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Abstract Nanomechanical devices made from ultrathin materials are transforming diverse fields, including sensing, signal processing, and quantum technologies. However, as these materials become thinner, their low bending rigidity poses significant fabrication challenges, and achieving nanometer-thick flat cantilevers with consistent and predictable mechanical responses has remained elusive despite decades of research. Here we present nanometer-thick, ultraflat cantilever resonators fabricated using atomic layer deposition. By effectively mitigating the effects of uncontrollable built-in strain and geometric disorder, the ultraflat nanocantilevers exhibit resonance frequencies closely aligned with thin-plate theory predictions and display low sample-to-sample variability. These cantilevers maintain mechanical stability in both vacuum and air environments, even at large length-to-thickness ratios of up to 3000. The ultraflat nanocantilevers are approaching the thickness limit, beyond which thermal fluctuations at room temperature can spontaneously induce random ripples in otherwise flat films. 

Internet-of-things (IoT) devices (e.g., micro camera and microphone) are usually small form factor, low-cost, and low-power, which makes them easy to conceal and deploy in the indoor environment to spy on people for human private information such as location and indoor activities. As a result, these IoT devices introduce a great privacy and ethical threat. Therefore, it is important to reveal these concealed IoT devices in the indoor environment for human privacy protection. This paper presents RFScan, a system that can passively detect, fingerprint, and localize diverse concealed IoT devices in the indoor environment by sensing their unintentional electromagnetic emanations. However, sensing these emanations is challenging due to the weak emanation strength and the interference from the ambient wireless communication signals. To this end, we boost the emanation strength through the non-coherent averaging based on the emanation signal's characteristics and design a novel suppression algorithm to mitigate interference from the wireless communication signals. We further profile emanations across frequency and time that act as the emanation source's unique signature and customize a deep neural network architecture to fingerprint the emanation sources. Furthermore, we can localize the emanation source with an angle-of-arrival (AoA) based triangulation approach. Our experimental results demonstrate the efficiency of the IoT devices' detection, fingerprinting, and localization across different indoor environments. 

In this work, we introduce MOLA, a multi-block orthogonal long short-term memory autoencoder paradigm, to conduct accurate, reliable fault detection of industrial processes. To achieve this, MOLA effectively extracts dynamic orthogonal features by introducing an orthogonality-based loss function to constrain the latent space output. This helps eliminate the redundancy in the features identified, thereby improving the overall monitoring performance. On top of this, a multi-block monitoring structure is proposed, which categorizes the process variables into multiple blocks by leveraging expert process knowledge about their associations with the overall process. Each block is associated with its specific orthogonal long short-term memory autoencoder model, whose extracted dynamic orthogonal features are monitored by distance-based Hotelling's T^2 statistics and quantile-based cumulative sum (CUSUM) designed for multivariate data streams that are nonparametric and heterogeneous. Compared to having a single model accounting for all process variables, such a multi-block structure significantly improves overall process monitoring performance, especially for large-scale industrial processes. Finally, we propose an adaptive weight-based Bayesian fusion (W-BF) framework to aggregate all block-wise monitoring statistics into a global statistic that we monitor for faults. Fault detection speed and accuracy are improved by assigning and adjusting weights to blocks based on the sequential order in which alarms are raised. We demonstrate the efficiency and effectiveness of our MOLA framework by applying it to the Tennessee Eastman process and comparing the performance with various benchmark methods.